Analysis techniques
Thanks to its wide range of techniques, Science et Surface can select the techniques that meet your requirements.
The performances of each technique are presented in the schema and table below :
| Elementary | Quanti | Chemical | Sensitivity | Depth profiling | Spot size |
Profile | Insulators | |
|---|---|---|---|---|---|---|---|---|
| XPS | yes | yes | yes | 0,1 % at. | 10 nm | 10 µm | yes -> 1 µm |
yes |
| AES | yes | yes | yes | 0,1 % at. | 10 nm | 0,1 µm | yes -> 1 µm |
no |
| DSIMS | yes | difficult | no | ppm-ppb | – | 0,3 µm | yes -> 10 µm |
yes |
| SSIMS | yes | difficult | yes molecular | femtomole | < 1 nm | 0,3 µm | – | yes |
| GD-OES | yes | yes | no | ppm | – | no | yes -> 100 µm |
yes (RF) |
| EDS (SEM) |
yes | yes | no | 0,1 % at. | 1 µm | 1 µm | no | yes |
| FTIR |
no | no | yes molecular | 1000 ppm | 1 µm | 3 µm | no | yes |
| TEM |
yes with EDS | yes with EDS | yes with EELS | 1%at. | 100 nm | down to the nanometer | no | yes |
